Radiation source and lithographic apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 5, 2017
Issued Date -
N/A
app pub date -
Jun 13, 2013
filing date -
Jun 22, 2012
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A radiation source comprising a fuel source configured to deliver fuel to a location from which the fuel emits EUV radiation. The radiation source further comprises an immobile fuel debris receiving surface provided with a plurality of grooves. The grooves have orientations which are arranged to direct the flow of liquid fuel under the influence of gravity in one or more desired directions.
First Claim
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International Classification(s)
- 2013 Application Filing Year
- G21K Class
- 339 Applications Filed
- 303 Patents Issued To-Date
- 89.39 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- G21K Class
- 17.50 % this patent is cited more than
- 8 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Mar 5, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Mar 5, 2029 |
