Negative stiffness system for gravity compensation of micropositioner

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9752643
SERIAL NO

14652055

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A negative stiffness system for gravity compensation of a micropositioner of wafer table in lithography machine, characterized in that, the negative stiffness system includes at least three sets of quasi-zero stiffness units, each of the sets of quasi-zero stiffness units comprises a pair of negative stiffness springs and a positive stiffness spring, the positive stiffness spring is vertically positioned, the pair of negative stiffness springs are obliquely and symmetrically positioned at two sides of the positive stiffness spring, upper ends of the negative stiffness springs and the positive stiffness spring are connected together and fixed to the bottom surface of a rotor of the micropositioner, and lower ends of the negative stiffness springs and the positive stiffness spring are connected to a base, respectively. The system reduces the stiffness in vertical direction and prevents the influence of permanent magnet on its surroundings, while improving the bearing capacity.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
TSINGHUA UNIVERSITYNO 1 QINGHUA YUAN HAIDIAN DISTRICT BEIJING 100084
SHANGHAI MICRO ELECTRONICS EQUIPMENT CO LTDSHANGHAI 201203

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheng, Rong Beijing, CN 32 48
Hu, Chuxiong Beijing, CN 5 7
Hu, Jinchun Beijing, CN 28 50
Liu, Hao Beijing, CN 555 2317
Liu, Zhao Beijing, CN 65 453
Mu, Haihua Beijing, CN 17 35
Tian, Li Beijing, CN 153 155
Wang, Jing Beijing, CN 1745 13464
Xu, Dengfeng Beijing, CN 33 310
Yang, Kaiming Beijing, CN 31 58
Yin, Wensheng Beijing, CN 25 65
Zhang, Ming Beijing, CN 891 7236
Zhu, Yu Beijing, CN 384 3919

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Mar 5, 2025
11.5 Year Payment $7400.00 $3700.00 $1850.00 Mar 5, 2029
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00