Preliminary ionization discharge device and laser apparatus
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United States of America Patent
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Aug 29, 2017
Grant Date -
Jun 16, 2016
app pub date -
Dec 2, 2015
filing date -
Jul 10, 2013
priority date (Note) -
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Abstract
A preliminary ionization discharge device used in a laser chamber of a laser apparatus using preliminary ionization includes a dielectric pipe; a preliminary ionization inner electrode provided inside the dielectric pipe; and a preliminary ionization outer electrode provided outside the dielectric pipe. The preliminary ionization outer electrode includes: a contact plate part configured to contact the dielectric pipe; and an elastic part configured to exert a force in a direction in which the contact plate part pushes the dielectric pipe.
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