Apparatus for liquid treatment of disc-shaped articles and heating system for use in such apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9748120
SERIAL NO

13932926

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An apparatus for treating a disc-shaped article comprises a spin chuck and at least three individually controllable infrared heating elements. The infrared heating elements are mounted in a stationary manner with respect to rotation of said spin chuck. The infrared heating elements are arranged in a nested configuration so as to define individually controllable inner, middle and outer heating zones adjacent a disc-shaped article when positioned on the spin chuck.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
LAM RESEARCH AGSEZ STRASSE 1 VILLACH A-9500

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Badam, Vijay Kumar Villach, AT 7 39
Crabb, Kevin Matthew Villach, AT 1 7
Engesser, Philipp Lindau, DE 12 88

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Feb 28, 2025
11.5 Year Payment $7400.00 $3700.00 $1850.00 Feb 28, 2029
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00