Lithographic apparatus and device manufacturing method
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United States of America Patent
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Aug 29, 2017
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app pub date -
Oct 13, 2016
filing date -
Aug 19, 2004
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Abstract
A lithographic projection apparatus, including a liquid supply system configured to supply a liquid to a space between a projection system and a movable table; a member to at least partly confine liquid in the space, the member including a recovery opening facing toward the movable table, the recovery opening including a first porous structure configured to recover fluid; and a chamber configured to receive recovered fluid and to separate liquid from gas in the recovered fluid, the chamber including a second porous structure.
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