Titania-doped quartz glass and making method

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United States of America Patent

PATENT NO 9746773
APP PUB NO 20130283858A1
SERIAL NO

13920628

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Abstract

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Methods for selecting titania-doped quartz glass which experiences a reduction in OH group concentration of less than or equal to 100 ppm upon heat treatment at 900° C. for 100 hours as suitable material for the EUV lithography member.

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Patent Owner(s)

Patent OwnerAddress
SHIN-ETSU CHEMICAL CO LTDTOKYO JAPAN TOKYO METROPOLIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ezaki, Masanobu Koriyama, JP 8 38
Maida, Shigeru Joetsu, JP 20 95
Otsuka, Hisatoshi Joetsu, JP 34 169
Ueda, Tetsuji Koriyama, JP 30 324

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