Device for receiving and submitting a substrate
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United States of America Patent
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Aug 29, 2017
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N/A
app pub date -
Jul 12, 2012
filing date -
Jul 12, 2012
priority date (Note) -
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Abstract
A device, method and system for receiving and submitting a substrate, the device including an XY table, the XY table having one or a plurality of sides for accepting a substrate, a set of manipulators coupled to the XY table, the manipulators configured to accept and register the substrate from the one or plurality of sides of the XY table, and a set of retractable dividers on the XY table configurable to register one or a plurality of substrates concurrently.
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