Laser device and extreme ultraviolet light generation system
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United States of America Patent
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Aug 22, 2017
Grant Date -
Oct 27, 2016
app pub date -
Jul 6, 2016
filing date -
Feb 10, 2014
priority date (Note) -
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Abstract
An example laser apparatus of the disclosure may include an oscillator capable of outputting a laser beam, a slab optical amplifier capable of amplifying the laser beam outputted by the oscillator by passing the laser beam through an optical amplification region shaped like a slab and outputting the amplified laser beam, and a mirror disposed on an optical path of the laser beam to enter the slab optical amplifier or the amplified laser beam outputted from the slab optical amplifier, the mirror being movable in a direction parallel to a plane where the laser beam travels in the slab optical amplifier.
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