System and method for control of high efficiency generator source impedance
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United States of America Patent
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Aug 22, 2017
Issued Date -
Sep 24, 2015
app pub date -
Mar 24, 2015
filing date -
Mar 24, 2014
priority date (Note) -
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Abstract
Systems and methods for adjusting the source impedance of a generator are disclosed. An exemplary method includes generating a first signal and applying the first signal to a first input of a combiner, generating a second signal and applying the second signal to a second input of said combiner, and combining the first and second signals with the combiner at an output of the combiner to produce power that is delivered to the plasma load. A controllable variable impedance is provided to an isolation port of the combiner, and the controllable variable impedance is adjusted to vary the source impedance of the generator.
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