Controlling opening angle of a resonating mirror
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United States of America Patent
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Aug 22, 2017
Issued Date -
N/A
app pub date -
Nov 10, 2015
filing date -
Nov 10, 2015
priority date (Note) -
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Abstract
A device described herein includes a movable MEMS mirror, with a driver configured to drive the movable MEMS mirror with a periodic signal such that the MEMS mirror oscillates at its resonance frequency. A feedback measuring circuit is configured to measure a signal flowing through the movable MEMS mirror. A processor is configured to sample the signal at first and second instants, generate an error signal as a function of a difference between the signal at the first instant in time and the signal at the second instant in time, and determine the opening angle of the movable MEMS mirror as a function of the error signal.
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