Purge devices having micronozzles and operating methods thereof
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United States of America Patent
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Aug 22, 2017
Grant Date -
Oct 13, 2016
app pub date -
Jun 16, 2015
filing date -
Apr 7, 2015
priority date (Note) -
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Abstract
The present invention provides purge devices having micronozzles and operating methods thereof. The purge device having micronozzles are operated to clean pellicles used in semiconductor manufacturing. The purge devices having micronozzles comprises a base, at least one track configured on the base, a rotation platform, and a micronozzle array, in which the micronozzle array further comprises an air duct and a plurality of nozzles. Additionally, the rotation platform and the micronozzle array are able to move relatively to another along the at least one track.
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