Pneumatic micropump
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United States of America Patent
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Aug 15, 2017
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N/A
app pub date -
May 3, 2012
filing date -
Sep 7, 2011
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Abstract
A pneumatic micropump is provided. The pneumatic micropump includes a fluidic channel layer, an upper substrate, a lower substrate, an upper membrane and a lower membrane. The fluidic channel includes a fluid inlet a reservoir, and a fluid outlet, wherein the fluid passes through the fluid inlet, the reservoir and the fluid outlet, successively. The upper substrate includes an upper pneumatic chamber facing the reservoir. The lower substrate includes a lower pneumatic chamber facing the reservoir. The upper membrane is disposed between the upper pneumatic chamber and the reservoir, and the lower membrane is disposed between the lower pneumatic chamber and the reservoir.
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