Method of preparing synthetic quartz glass substrate
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United States of America Patent
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Aug 15, 2017
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app pub date -
Jan 15, 2015
filing date -
Jan 20, 2014
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Abstract
A synthetic quartz glass substrate is prepared by immersing a starting substrate in an aqueous solution of a nonionic surfactant and precision polishing the substrate with a colloidal silica water dispersion. A synthetic quartz glass substrate having a few defects and low surface roughness is obtained while the polishing rate is improved and the polishing time is reduced.
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