Substrate with built-in passive element
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United States of America Patent
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Aug 8, 2017
Grant Date -
Jul 24, 2014
app pub date -
Jan 15, 2014
filing date -
Jan 24, 2013
priority date (Note) -
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Abstract
A substrate with built-in passive element includes passive elements and a substrate. The passive elements include at least one of a capacitor, an inductor, a resistor, a signal transmission element or an optical waveguide element. The capacitor, the inductor, the resistor, the signal transmission element or the optical waveguide element has a functional element filled in a groove-like or hole-like element forming region provided in the substrate along a thickness direction thereof. The functional element has a Si—O bond region obtained by reacting Si particles with an organic Si compound.
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