Thermal transpiration device and method of making same
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United States of America Patent
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-
Aug 8, 2017
Issued Date -
N/A
app pub date -
Mar 1, 2012
filing date -
Sep 3, 2009
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A thermal transpiration device and method of making the same. The device includes a pair of membranes having predetermined thicknesses in order to provide the device with strength and rigidity. The thickness of a portion of each membrane is reduced in the area where thermal transpiration occurs in order to optimize the effectiveness of the thermal transpiration device without scarifying structural integrity of the device.
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Cited Art Landscape
Patent Citation Ranking
- 2 Citation Count
- H01L Class
- 18.50 % this patent is cited more than
- 8 Age
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