Mass analyzing electromagnet and ion beam irradiation apparatus

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United States of America Patent

PATENT NO 9728390
SERIAL NO

14876263

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Abstract

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A mass analyzing electromagnet is provided. The mass analyzing electromagnet includes an analysis tube having an internal zone formed as a passage for the ion beam; and

    a shield member mounted to an inner wall surface of the analyzing tube, a portion of the shield member intersecting with a direction perpendicular to a traveling direction of an ion beam and a mass-based separation direction of the ion beam so as to block a portion of the ion beam.

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Patent Owner(s)

Patent OwnerAddress
NISSIN ION EQUIPMENT CO LTD575 KUZE-TONOSHIRO-CHO MINAMI-KU KYOTO-SHI KYOTO 601-8205

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dohi, Shojiro Kyoto, JP 3 4
Nishimura, Ippei Kyoto, JP 4 0
Tatemichi, Junichi Kyoto, JP 2 8

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