Shock-robust integrated multi-axis MEMS gyroscope
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United States of America Patent
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Aug 8, 2017
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Sep 4, 2014
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May 16, 2014
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Abstract
Various embodiments of the invention integrate multiple shock-robust single-axis MEMS gyroscopes into a single silicon substrate while avoiding the complexities typically associated with designing a multi-drive control system for shock immune gyroscopes. In certain embodiments of the invention, a shock immune tri-axial MEMS gyroscope is based on a driving scheme that employs rotary joints to distribute driving forces generated by two sets of driving masses to individual sensors, thereby, simplifying the control of the gyroscope.
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