Graphite wafer carrier for LED epitaxial wafer processes
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United States of America Patent
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Aug 8, 2017
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N/A
app pub date -
Dec 31, 2014
filing date -
Dec 3, 2012
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Abstract
A graphite wafer carrier for LED epitaxial wafer processes, having a plurality of wafer pocket profiles above the carrier for carrying the epitaxial wafer substrate. The inner edge of the wafer pocket profile is a concave step with a plurality of inward-extended support portions; and also has a graphite wafer carrier edge and an axle hole at the center of the graphite wafer carrier. The pocket profiles of different quantities and sizes can be arranged on the basis of different process parameters. The disclosed structure can reduce or eliminate airflow interference and improve the wafer edge yield.
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