Table device and conveyance device
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United States of America Patent
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Aug 8, 2017
Grant Date -
May 19, 2016
app pub date -
Dec 18, 2013
filing date -
Jul 2, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
A table device including: a first base including a first reference surface; a second base including a second reference surface, and movable on the first reference surface in a direction parallel to a first axis; a first bearing member provided to the second base, and forming a gas bearing between the first bearing member and the first reference surface; a second bearing member provided to the second base, apart from the first bearing member relative to a direction parallel to a second axis perpendicular to the first axis, and forming a gas bearing between the second bearing member and the first reference surface; and a table movable on the second reference surface. A distance between the first bearing member and the second bearing member is longer than a dimension of a moving range of the table relative to the direction parallel to the second axis.
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