Brush cleaning method

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United States of America Patent

PATENT NO 9723915
SERIAL NO

14817264

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Abstract

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A method for cleaning a brush includes inducing a static charge on a surface of a first plate, wherein the first plate comprises at least one of silicon nitride (SixNy) or silicon oxide (SiaOb), wherein a, b, x and y are integers. The method further includes rotating the brush in contact with the surface of the first plate.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDNO 8 LI-HSIN ROAD 6 HSINCHU SCIENCE PARK HSINCHU 300

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Liang-Guang Hsinchu, TW 82 310
Huang, Fu-Ming Shengang Township, TW 28 58
Kuo, Han-Hsin Tainan, TW 16 137
Peng, He Hui Changhua, TW 16 38
Tsai, Chi-Ming New Taipei, TW 98 501

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