Method of producing plasma by multiple-phase alternating or pulsed electrical current

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United States of America Patent

PATENT NO 9721764
SERIAL NO

14942673

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Abstract

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A method of producing a plasma is provided. The method includes providing at least three hollow cathodes, including a first hollow cathode, a second hollow cathode, and a third hollow cathode. Each hollow cathode has a plasma exit region. The method further includes providing a source of power capable of producing multiple output waves, including a first output wave, a second output wave, and a third output wave. The first output wave and the second output wave are out of phase, the second output wave and the third output wave are out of phase, and the first output wave and the third output wave are out of phase. Each hollow cathode is electrically connected to the source of power such that the first hollow cathode is electrically connected to the first output wave, the second hollow cathode is electrically connected to the second output wave, and the third hollow cathode is electrically connected to the third output wave. Electrical current flows between the at least three hollow cathodes that are out of electrical phase. A plasma is generated between the hollow cathodes.

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Patent Owner(s)

Patent OwnerAddress
AGC FLAT GLASS NORTH AMERICA INC11175 CICERO DRIVE SUITE 400 ALPHARETTA GA 30022-1167
ASAHI GLASS CO LTDTOKYO TOKYO METROPOLIS
AGC GLASS EUROPE S ATECHNOVATION CENTRE RUE LOUIS BLÉRIOT 12 GOSSELIES 6041

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chambers, John San Francisco, US 32 312
Maschwitz, Peter Sebastopol, US 24 861

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