Processing system with galvano scanner capable of high speed laser scanning

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United States of America Patent

PATENT NO 9720225
SERIAL NO

14840226

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Abstract

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A processing system including a laser beam source which generates a laser beam, a galvano scanner which includes a mirror for reflecting the laser beam and a servo motor for rotating the mirror and which emits the laser beam to a workpiece, and an operation control device which controls the operation of the servo motor in accordance with a sinusoidal drive command.

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Patent Owner(s)

Patent OwnerAddress
FANUC CORPORATION3580 SHIBOKUSA AZA-KOMANBA OSHINO-MURA MINAMITSURU-GUN YAMANASHI 4010597 ?4010597

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sonoda, Naoto Yamanashi, JP 71 519
Toyozawa, Yukio Yamanashi, JP 39 468

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