Interferometer with real-time fringe-free imaging

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United States of America Patent

PATENT NO 9719777
SERIAL NO

14723803

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Abstract

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Methods include: directing test light and reference light along different optical paths, where a test object is in a path of the test light; forming an image of the test object on a multi-element detector by directing test light from the test object to the detector; overlapping the reference light with the test light on the detector; detecting an intensity of the overlapped test and reference light with the detector, the intensity being detected at a frame rate; and modulating an optical path difference (OPD) between the test and reference light at the detector while detecting the light intensity. The OPD is modulated at a rate and amplitude sufficient to reduce a contrast of fringes in a spatial interference pattern formed by the light at the detector over a frame of the detector. Accordingly, fringe-free images may be acquired real-time.

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Patent Owner(s)

Patent OwnerAddress
ZYGO CORPORATION21 LAUREL BROOK ROAD MIDDLEFIELD CT 06455

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Colonna, de Lega Xavier Middlefield, US 19 318
Liesener, Jan Middletown, US 21 315

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