Method of supporting a workpiece during physical vapour deposition
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United States of America Patent
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Aug 1, 2017
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app pub date -
Jun 20, 2012
filing date -
Jun 21, 2011
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Abstract
Methods and related apparatus support a work piece during a physical vapor deposition. An aluminium support having a support surface coated with a heat absorbent coating is provided. The support is cooled to around 100° C. and a PVD process is performed such that, with cooling, the work piece temperature is between 350° C. and 450° C. The coating is inert and/or ultra-high voltage compatible.
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