UV light source having combined ionization and formation of excimers
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United States of America Patent
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Aug 1, 2017
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N/A
app pub date -
Oct 18, 2013
filing date -
Oct 19, 2012
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Abstract
The invention relates to a device for producing UV light. Said device provides light from light sources that operate in accordance with different physical principles. The device comprises a chamber having several gas-filled plasma chambers (11, 12), wherein the chamber has at least one area (37, 39) transparent to UV light and/or VUV light. A first group (11) of plasma chambers is filled with an ionizable gas containing mercury and a second group (12) of plasma chambers is filled with a gas that forms excimers when suitably excited.
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