CMOS ultrasonic transducers and related apparatus and methods

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United States of America Patent

PATENT NO 9718098
SERIAL NO

15158968

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Abstract

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CMOS Ultrasonic Transducers and processes for making such devices are described. The processes may include forming cavities on a first wafer and bonding the first wafer to a second wafer. The second wafer may be processed to form a membrane for the cavities. Electrical access to the cavities may be provided.

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Patent Owner(s)

Patent OwnerAddress
BFLY OPERATIONS INC530 OLD WHITFIELD STREET GUILFORD CT 06437

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Charvat, Gregory L Guilford, US 145 7491
Fife, Keith G Palo Alto, US 221 4923
Ralston, Tyler S Clinton, US 190 5485
Rothberg, Jonathan M Guilford, US 567 39206
Sanchez, Nevada J Guilford, US 144 3830

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