Sulfonic acid derivative and photoacid generator

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United States of America Patent

PATENT NO 9714217
APP PUB NO 20120289738A1
SERIAL NO

13574683

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Abstract

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Sulfonic acid derivatives of general formula RCOOCH2CH2CFHCF2SO3-M+ are provided, wherein R represents a substituted or unsubstituted C1-30 linear, branched, or cyclic hydrocarbon group, or a substituted or unsubstituted C6-30 aryl group, and M+ represents a counter cation. Photoacid generators and photoresists containing such sulfonic acid derivatives are also provided.

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Patent Owner(s)

Patent OwnerAddress
TOYO GOSEI CO LTD1603 KAMIMYODEN ICHIKAWA-SHI CHIBA 2720012

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hosoi, Yasuhiro Chiba, JP 12 108
Kaneko, Yuzuru Chiba, JP 15 6

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