Microelectromechanical resonator

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United States of America Patent

PATENT NO 9712128
SERIAL NO

15186510

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Abstract

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In a MEMS device having a substrate and a moveable micromachined member, a mechanical structure secures the moveable micromachined member to the substrate, thermally isolates the moveable micromachined member from the substrate and provides a conduction path to enable heating of the moveable micromachined member to a temperature of at least 300 degrees Celsius.

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Patent Owner(s)

Patent OwnerAddress
SITIME CORPORATION5451 PATRICK HENRY DRIVE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Doll, Joseph C Mountain View, US 23 164
Grosjean, Charles I Los Gatos, US 61 247
Hagelin, Paul M Saratoga, US 72 552
Hill, Ginel C Sunnyvale, US 28 110
Miller, Nicholas Sunnyvale, US 53 644

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