Substrate storage container
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United States of America Patent
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Jul 18, 2017
Grant Date -
Nov 5, 2015
app pub date -
Nov 21, 2013
filing date -
Nov 28, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
The substrate storage container includes: a container body for storing a semiconductor wafer; a lid body for opening and closing a front of the container body; and a locking mechanism for locking the lid body that has closed the front of the container body. The lid body is formed of a lid main body to be fitted to the front of the container body and a cover plate for covering a front face of the lid main body. The locking mechanism includes a rotating operation portion that is pivotally supported by the lid main body and rotationally operated from an outside of the cover plate. A plurality of posture control members for the rotating operation portions are provided for, at least, the cover plate, among the cover plate and the rotating operation portion.
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