Inert atmospheric pressure pre-chill and post-heat
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Jul 18, 2017
Grant Date -
Dec 5, 2013
app pub date -
May 31, 2012
filing date -
May 31, 2012
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An ion implantation system provides ions to a workpiece positioned in a process environment of a process chamber on a sub-ambient temperature chuck. An intermediate chamber having an intermediate environment is in fluid communication with an external environment and has a cooling station and heating station for cooling and heating the workpiece. A load lock chamber is provided between the process chamber and intermediate chamber to isolate the process environment from the intermediate environment. A positive pressure source provides a dry gas within the intermediate chamber at dew point that is less than a dew point of the external environment to the intermediate chamber. The positive pressure source isolates the intermediate environment from the external environment via a flow of the dry gas from the intermediate chamber to the external environment.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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AXCELIS TECHNOLOGIES INC | 108 CHERRY HILL DRIVE BEVERLY MA 01915 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Drummond, Steve | Merrimac, US | 5 | 38 |
# of filed Patents : 5 Total Citations : 38 | |||
Lee, William D | Newburyport, US | 27 | 298 |
# of filed Patents : 27 Total Citations : 298 |
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Patent Citation Ranking
- 1 Citation Count
- H01J Class
- 25.25 % this patent is cited more than
- 8 Age
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Legal Events
Date | Code | Event | Description |
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Nov 23, 2020 | LAPS | LAPSE FOR FAILURE TO PAY MAINTENANCE FEES | free format text: PATENT EXPIRED FOR FAILURE TO PAY MAINTENANCE FEES (ORIGINAL EVENT CODE: EXP.); ENTITY STATUS OF PATENT OWNER: MICROENTITY |
Nov 23, 2020 | STCH | INFORMATION ON STATUS: PATENT DISCONTINUATION | free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
Oct 18, 2020 | FP | LAPSED DUE TO FAILURE TO PAY MAINTENANCE FEE | Effective Date: Oct 18, 2020 |
Jun 08, 2020 | FEPP | FEE PAYMENT PROCEDURE | free format text: MAINTENANCE FEE REMINDER MAILED (ORIGINAL EVENT CODE: REM.); ENTITY STATUS OF PATENT OWNER: MICROENTITY |
Oct 18, 2016 | I | Issuance | |
Sep 28, 2016 | STCF | INFORMATION ON STATUS: PATENT GRANT | free format text: PATENTED CASE |
Aug 20, 2015 | P | Published | |
Feb 18, 2014 | F | Filing | |
Feb 18, 2014 | PD | Priority Date |

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