Curved RF electrode for improved Cmax

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United States of America Patent

PATENT NO 9711290
APP PUB NO 20160240320A1
SERIAL NO

15024931

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention generally relates to a MEMS device and a method of manufacture thereof. The RF electrode, and hence, the dielectric layer thereover, has a curved upper surface that substantially matches the contact area of the bottom surface of the movable plate. As such, the movable plate is able to have good contact with the dielectric layer and thus, good capacitance is achieved.

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Patent Owner(s)

Patent OwnerAddress
CAVENDISH KINETICS INC2960 NORTH 1ST STREET SAN JOSE CA 95134

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Joshi, Vikram Mountain View, US 88 3602
Knipe, Richard L McKinney, US 55 1559
Maguire, Thomas L Santa Clara, US 6 22
Renault, Mickael San Jose, US 22 199
Van, Kampen Robertus Petrus S-Hertogenbosch, NL 43 282

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