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Country	kind	publication No.	Filing Date	Type	Sub-Type
CN	B	CN105593964	Sep 24, 2014	Patent	Grant
Type : Patent Sub-Type : Grant
GRANTED PATENT FOR INVENTION		For improving CmaxCurved surface RF electrodes		Aug 25, 2017
WO	A1	WO2015050761	Sep 24, 2014	Patent	Application
Type : Patent Sub-Type : Application
INTERNATIONAL APPLICATION PUBLISHED WITH INTERNATIONAL SEARCH REPORT		CURVED RF ELECTRODE FOR IMPROVED CMAX		Apr 09, 2015
EP	B1	EP3053181	Sep 24, 2014	Patent	Grant
Type : Patent Sub-Type : Grant
Patent		CURVED RF ELECTRODE FOR IMPROVED CMAX		Apr 18, 2018
JP	B2	JP6434502	Sep 24, 2014	Patent	Grant
Type : Patent Sub-Type : Grant
PUBLISHED GRANTED PATENT (SECOND LEVEL)		改善されたＣＭＡＸのための湾曲したＲＦ電極		Dec 05, 2018

• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
CAVENDISH KINETICS INC	2960 NORTH 1ST STREET SAN JOSE CA 95134

International Classification(s)

• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
• B81C:PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE M....
• B81B:MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-ME....
• H01H:ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PR....
• H01G:CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWI....

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Joshi, Vikram	Mountain View, US	88	3602
# of filed Patents : 88 Total Citations : 3602
Knipe, Richard L	McKinney, US	55	1559
# of filed Patents : 55 Total Citations : 1559
Maguire, Thomas L	Santa Clara, US	6	22
# of filed Patents : 6 Total Citations : 22
Renault, Mickael	San Jose, US	22	199
# of filed Patents : 22 Total Citations : 199
Van, Kampen Robertus Petrus	S-Hertogenbosch, NL	43	282
# of filed Patents : 43 Total Citations : 282

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Jan 18, 2029

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
July 18, 2017	US,9711290,B2   US9711290B2	GRANTED PATENT AS SECOND PUBLICATION
August 18, 2016	US,20160240320,A1   US20160240320A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 9711290

Curved RF electrode for improved Cmax

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Abstract

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The present invention generally relates to a MEMS device and a method of manufacture thereof. The RF electrode, and hence, the dielectric layer thereover, has a curved upper surface that substantially matches the contact area of the bottom surface of the movable plate. As such, the movable plate is able to have good contact with the dielectric layer and thus, good capacitance is achieved.

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Description

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Claims

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Claims data not available

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Legal Events

 

• MAFP2024
• MAFP2021
• FEPP2020
• AS2020
• I2017
• STCF2017
• P2016
• AS2016
• F2014

Date	Code	Event	Description
Dec 21, 2024	MAFP	MAINTENANCE FEE PAYMENT	free format text: PAYMENT OF MAINTENANCE FEE, 8TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1552); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 8
Jan 13, 2021	MAFP	MAINTENANCE FEE PAYMENT	free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 4
Oct 28, 2020	FEPP	FEE PAYMENT PROCEDURE	free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY
Jun 23, 2020	AS	ASSIGNMENT	free format text: PLAN OF DISSOLUTION OF CAVENDISH KINETICS INC;ASSIGNOR:CAVENDISH KINETICS INC.;REEL/FRAME:059113/0181 Owner name: QORVO US, INC., NORTH CAROLINA Effective Date: Jun 23, 2020
Jul 18, 2017	I	Issuance
Jun 28, 2017	STCF	INFORMATION ON STATUS: PATENT GRANT	free format text: PATENTED CASE
Aug 18, 2016	P	Published
Jul 28, 2016	AS	ASSIGNMENT	free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:RENAULT, MICKAEL;JOSHI, VIKRAM;VAN KAMPEN, ROBERTUS PETRUS;AND OTHERS;SIGNING DATES FROM 20160726 TO 20160727;REEL/FRAME:039285/0059 Owner name: CAVENDISH KINETICS, INC., CALIFORNIA
Sep 24, 2014	F	Filing