High voltage high current vacuum integrated circuit
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United States of America Patent
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Jul 18, 2017
Grant Date -
Jul 2, 2015
app pub date -
Mar 16, 2015
filing date -
Jan 23, 2009
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Abstract
A high voltage, high current vacuum integrated circuit includes a common vacuum enclosure that includes at least two cold-cathode field emission electron tubes, and contains at least one internal vacuum pumping means, at least one exhaust tubulation, vacuum-sealed electrically-insulated feedthroughs, and internal electrical insulation. The cold-cathode field emission electron tubes are configured to operate at high voltage and high current and interconnected with each other to implement a circuit function.
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