Temperature-engineered MEMS resonator
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 11, 2017
Grant Date -
N/A
app pub date -
Feb 9, 2015
filing date -
Feb 9, 2014
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Degenerately doped semiconductor materials are deployed within resonant structures to control the first and higher order temperature coefficients of frequency, thereby enabling temperature dependence to be engineered without need for cumulative material layers which tend to drive up cost and compromise resonator performance.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully