Ferroelectric thin film, method of manufacturing same and method of manufacturing piezoelectric element
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 11, 2017
Grant Date -
Sep 5, 2013
app pub date -
Oct 26, 2011
filing date -
Nov 10, 2010
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
In order to obtain a ferroelectric thin film that is formed to have a predetermined thickness on a substrate, that have satisfactory crystallization and that achieves a high piezoelectric property, a method of manufacturing such a ferroelectric thin film and a method of manufacturing a piezoelectric element having such a ferroelectric thin film, when a dielectric material of a perovskite structure is formed into a film on the substrate, a predetermined amount of additive is mixed with PZT, and the concentration of the additive mixed is varied in the thickness direction of the thin film.
First Claim
Family
International Classification(s)
- C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- G01J:MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTE....
- C04B:LIME; MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREO....
- B41J:TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. M....
- H03H:IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONA....
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully