X-ray analysis in air

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United States of America Patent

PATENT NO 9704688
SERIAL NO

15024773

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Abstract

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An x-ray analysis apparatus comprises an electron beam assembly for generating a focused electron beam within a first gas pressure environment. A sample assembly is used for retaining a sample within a second gas pressure environment such that the sample receives the electron beam from the electron beam assembly and such that the gas pressure in the second gas pressure environment is greater than the gas pressure within the first gas pressure environment. An x-ray detector is positioned so as to have at least one x-ray sensor element within the first gas pressure environment. The sensor element is mounted to a part of the electron beam assembly which is proximal to the sample assembly and further arranged in use to receive x-rays generated by the interaction between the electron beam and the sample.

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Patent Owner(s)

Patent OwnerAddress
OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITEDTUBNEY WOODS ABINGDON OXON OX13 5QX

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Statham, Peter Buckinghamshire, GB 11 12

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