Imprint method, imprint apparatus, and article manufacturing method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 11, 2017
Issued Date -
N/A
app pub date -
Mar 7, 2013
filing date -
Mar 12, 2012
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The imprint method includes changing the position of a detector that detects an alignment mark formed on a shot on a substrate; bringing a pattern formed on a mold into contact with an imprint material supplied on the shot on the substrate; and detecting the alignment mark using the detector after completion of the change in the position of the detector. Here, the contacting is started prior to completion of the change in the position of the detector.
First Claim
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International Classification(s)
- 2013 Application Filing Year
- B41F Class
- 287 Applications Filed
- 246 Patents Issued To-Date
- 85.72 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- B41F Class
- 29.53 % this patent is cited more than
- 8 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jan 11, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jan 11, 2029 |
