Optical scanning probe

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9696146
SERIAL NO

14387552

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention relates to a scanning probe (100) for the dimensional acquisition of an object (400) by irradiating the object (400) with light and detecting reflected light comprising: a detection unit (120) comprising an imaging sensor (122) and a sensor lens assembly (124) for detecting the reflected light, a light projecting unit (141) comprising a light source (142) for generating light, and source optics (145) for focusing the light, and light plane generating optics (143) for generating a light plane (149) for irradiating the object, and an adjustment mechanism (155) comprised in the light projecting unit (141), for adjusting the position or orientation of the light plane relative to the detection unit. It further relates to a method for assembly of a scanning probe (100).

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Patent Owner(s)

Patent OwnerAddress
NIKON METROLOGY NV3001 LEUVEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Blanckaert, Patrick Boortmeerbeek, BE 4 18
Nysen, Raf Veltem-Beisem, BE 2 7
Thys, Frank Willebroek, BE 4 50
Vandenhoudt, Geert Kessel-Lo, BE 3 13

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