Recovery of hydrohalosilanes from reaction residues
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United States of America Patent
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Jul 4, 2017
Grant Date -
Jan 7, 2016
app pub date -
Jul 1, 2014
filing date -
Jul 1, 2014
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Abstract
Methods of recovering hydrohalosilanes from reaction residues are disclosed. An inorganic halosilane slurry comprising (i) tetrahalosilane, trihalosilane, dihalosilane, or any combination thereof, (ii) silicon particles, and (iii) heavies is passed through a thin-film dryer to remove halosilanes and form a solid residue comprising silicon particles. Heavies also may be removed as the slurry passes through the thin-film dryer.
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