Textured metallic back reflector

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United States of America Patent

PATENT NO 9691921
SERIAL NO

12904047

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Embodiments of the invention generally relate to device fabrication of thin films used as solar devices or other electronic devices, and include textured back reflectors utilized in solar applications. In one embodiment, a method for forming a textured metallic back reflector which includes depositing a metallic layer on a gallium arsenide material within a thin film stack, forming an array of metallic islands from the metallic layer during an annealing process, removing or etching material from the gallium arsenide material to form apertures between the metallic islands, and depositing a metallic reflector layer to fill the apertures and cover the metallic islands. In another embodiment, a textured metallic back reflector includes an array of metallic islands disposed on a gallium arsenide material, a plurality of apertures disposed between the metallic islands and extending into the gallium arsenide material, a metallic reflector layer disposed over the metallic islands, and a plurality of reflector protrusions formed between the metallic islands and extending from the metallic reflector layer and into the apertures formed in the gallium arsenide material.

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Patent Owner(s)

  • ALTA DEVICES, INC.;AWBSCQEMGK, INC.

International Classification(s)

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  • 2010 Application Filing Year
  • H01L Class
  • 16510 Applications Filed
  • 13147 Patents Issued To-Date
  • 79.64 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20102011201220132014201520162017201820192020202120220255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Atwater, Harry South Pasadena, US 35 481
Kayes, Brendan Santa Clara, US 4 41
Kizilyalli, Isik C San Francisco, US 145 1919
Nie, Hui Santa Clara, US 97 729

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Patent Citation Ranking

  • 6 Citation Count
  • H01L Class
  • 18.50 % this patent is cited more than
  • 8 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges26979357140748325312788503629173801 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +050010001500200025003000350040004500500055006000650070007500800085009000950010000

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