Supporting unit and substrate-treating apparatus including the same
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United States of America Patent
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Jun 27, 2017
Grant Date -
Dec 29, 2016
app pub date -
May 31, 2016
filing date -
Jun 23, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
A supporting unit is provided. The supporting unit includes a body, an alignment member, at least one sensor, and a controller. The body has a top surface supporting a target object. The alignment member is disposed in the body and adjusts a position of the target object. The sensor senses the position of the target object. The controller controls the alignment member and the sensor member. The alignment member includes a magnet that adjusts the position of the target object according to an electromagnetic force; and a coil that applies the electromagnetic force to the magnet.
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