Pedestal alignment tool for an orienter pedestal of an ion implant device
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United States of America Patent
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Jun 27, 2017
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N/A
app pub date -
Jun 17, 2016
filing date -
Jun 17, 2016
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Abstract
A pedestal alignment tool for adjusting an orienter pedestal of an ion implant device is provided, wherein the pedestal is configured to orient a wafer prior to implantation in the ion implant device, the pedestal alignment tool comprising supporting elements configured for contacting a surface of the pedestal, a base comprising a top surface and openings for receiving the supporting elements, and adjustment means configured for adjusting lengths of the supporting elements over which the supporting elements protrude from the top surface of the base.
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