Optical beam scanner
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United States of America Patent
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Jun 27, 2017
Grant Date -
Apr 21, 2016
app pub date -
Oct 13, 2015
filing date -
Oct 15, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
A scanning device is presented having a substrate with a first surface and an opposite, parallel second surface. A region of the substrate includes the first surface and the opposite parallel second surface, and is defined via an etching process through a thickness of the substrate, where the region remains attached to the substrate via one or more hinges. A waveguide is patterned over the first surface of the region and guides a beam of radiation along a length of the waveguide. The scanning device includes a facet located on the first surface of the region. The facet is designed to reflect at least a portion of the beam of radiation through the region. An optical element is located on the second surface of the region, and is designed to receive the reflected portion of the beam of radiation.
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