Optical beam scanner
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 27, 2017
Grant Date -
Apr 21, 2016
app pub date -
Oct 13, 2015
filing date -
Oct 15, 2014
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A scanning device is presented having a substrate with a first surface and an opposite, parallel second surface. A region of the substrate includes the first surface and the opposite parallel second surface, and is defined via an etching process through a thickness of the substrate, where the region remains attached to the substrate via one or more hinges. A waveguide is patterned over the first surface of the region and guides a beam of radiation along a length of the waveguide. The scanning device includes a facet located on the first surface of the region. The facet is designed to reflect at least a portion of the beam of radiation through the region. An optical element is located on the second surface of the region, and is designed to receive the reflected portion of the beam of radiation.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2015 Application Filing Year
- G02B Class
- 9095 Applications Filed
- 7457 Patents Issued To-Date
- 82 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 5 Citation Count
- G02B Class
- 22.62 % this patent is cited more than
- 8 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Dec 27, 2024 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 27, 2028 |
