Scanning probe microscope
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United States of America Patent
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Jun 27, 2017
Grant Date -
Dec 8, 2016
app pub date -
May 31, 2016
filing date -
Jun 2, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
Disclosed herein is a scanning probe microscope including a cantilever, a three-dimensional moving mechanism moving a sample stage in three dimensions, and a measurement chamber sealed not to be exposed to external air. At least the cantilever, the sample stage, and the three-dimensional moving mechanism are accommodated in the measurement chamber. The measurement chamber is provided with a pair of guide rails used to transport the sample stage. The sample stage has an engagement portion. The three-dimensional moving mechanism is disposed in the vicinity of a predetermined position and between the guide rails. The three-dimensional moving mechanism can be moved to above the guide rails and below the guide rails. When the sample stage is transported to the predetermined position in a horizontal direction, the three-dimensional moving mechanism is lifted up to the bottom surface of the sample stage so that the scanning probe microscope can perform measurement.
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