Automatic gain tuning in atomic force microscopy

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United States of America Patent

PATENT NO 9689891
SERIAL NO

13117238

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Abstract

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A method for optimizing loop gain of an atomic force microscope (AFM) apparatus includes determining a change in gain of the physical system and adjusting a controller frequency response of the controller in an AFM loop to compensate for the determined change in gain. The AFM loop has a corresponding loop response that includes the product of the controller frequency response and a physical system response of the physical system.

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Patent Owner(s)

  • KEYSIGHT TECHNOLOGIES, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Moon, Christopher Ryan Cupertino, US 11 27

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