Coating method for gas delivery system
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United States of America Patent
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Jun 27, 2017
Grant Date -
Dec 18, 2014
app pub date -
Aug 29, 2014
filing date -
Apr 23, 2010
priority date (Note) -
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Abstract
A gas delivery system for a plasma process system such as a plasma etching system wherein inner surfaces of gas passages are coated with a corrosion-resistant material coating formed by curing a layer of fluidic precursor deposited on the inner surfaces. The coating can be formed by (a) flowing a fluidic precursor of a corrosion-resistant material through the gas passages and depositing a layer of the fluidic precursor to completely coat the inner surfaces of the gas passages; (b) removing excess fluidic precursor from the inner surfaces; (c) curing the deposited layer of the fluidic precursor to form a corrosion-resistant material coating.
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