Microvalve device and fluid flow control method

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United States of America Patent

PATENT NO 9689508
APP PUB NO 20150252914A1
SERIAL NO

14415383

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Abstract

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A microvalve device and fluid flow control method, the microvalve device comprising: a microvalve body, the microvalve body being composed of multiple layers and comprising a first layer (1) and a second layer (2) bonded with the first layer (1), the second layer (2) having a plurality of fluid ports (7, 8, 9); a cavity (6) disposed between the first layer and the second layer; a plurality of actuators (3, 4, 5) respectively disposed corresponding to each fluid port, the plurality of actuators (3, 4, 5) controlling the opening and closing of the plurality of fluid ports (7, 8, 9). The fluid flow control method comprising: respectively employing a plurality of actuators to independently control the opening and closing of a plurality of fluid ports.

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Patent Owner(s)

Patent OwnerAddress
TSINGHUA UNIVERSITYBEIJING
ZHEJIANG DUNAN ARTIFICIAL ENVIRONMENT CO LTD311835 SHAOXING ZHEJIANG PROVINCE ZHUJI PORT INDUSTRIAL ZONE SHAOXING CITY ZHEJIANG PROVINCE 311835

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Peiyi Beijing, CN 13 56
Deng, Ning Beijing, CN 34 189
Jiang, Tinghou Zhejiang, CN 2 8
Wang, Zheyao Beijing, CN 2 8
Zhang, Shengchang Zhejiang, CN 4 13

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