Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus
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United States of America Patent
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Jun 20, 2017
Grant Date -
Apr 28, 2016
app pub date -
Jan 5, 2016
filing date -
May 15, 2013
priority date (Note) -
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Abstract
An apparatus for treating a disc-shaped article comprises a spin chuck and at least three individually controllable infrared heating elements. The infrared heating elements are mounted in a stationary manner with respect to rotation of said spin chuck. At least the transparent plate positioned between the infrared heating elements and the underside of a wafer is mounted for rotation with the spin chuck. Alternatively, the transparent plate is part of a housing that encloses the infrared heating elements and that rotates with the spin chuck as the heating elements are stationary relative thereto.
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