Frequency and amplitude stabilization in MEMS and NEMS oscillators

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United States of America Patent

PATENT NO 9680414
SERIAL NO

15042912

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Abstract

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This invention comprises a nonlinear micro- and nano-mechanical resonator that can maintain frequency of operation and amplitude of operation for a period of time after all external power has been removed from the device. Utilizing specific nonlinear dynamics of the micromechanical resonator, mechanical energy at low frequencies can be input and stored in higher frequencies modes, thus using the multiple degrees of freedom of the resonator to extend its energy storage capacity. Furthermore, the energy stored in multiple vibrational modes can be used to maintain the resonator oscillating for a fixed period of time, even without an external power supply. This is the first demonstration of an “autonomous” frequency source that can maintain a constant frequency and vibrating amplitude when no external power is provided, making it ideal for applications requiring an oscillator in low power, or limited and intermittent power supplies.

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Patent Owner(s)

Patent OwnerAddress
UCHICAGO ARGONNE LLC5801 SOUTH ELLIS AVENUE CHICAGO IL 60637

International Classification(s)

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  • 2016 Application Filing Year
  • H03L Class
  • 676 Applications Filed
  • 589 Patents Issued To-Date
  • 87.14 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2016201720182019202020210255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Changyao Wilmette, US 15 27
Czaplewski, David A Naperville, US 7 47
Lopez, Omar Daniel Chicago, US 14 74

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Patent Citation Ranking

  • 8 Citation Count
  • H03L Class
  • 13.04 % this patent is cited more than
  • 8 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges69349652418401 - 1011 - 2021 - 3031 - 4041 - 500100200300255075125150175225250275325350375

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