Epitaxial lift off stack having a pre-curved handle and methods thereof
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United States of America Patent
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Jun 13, 2017
Grant Date -
Oct 1, 2015
app pub date -
May 27, 2015
filing date -
May 30, 2008
priority date (Note) -
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Abstract
Embodiments of the invention generally relate to epitaxial lift off (ELO) thin films and devices and methods used to form such films and devices. In one embodiment, a method for forming an ELO thin film is provided which includes depositing an epitaxial material over a sacrificial layer on a substrate, adhering a flattened, pre-curved support handle onto the epitaxial material, and removing the sacrificial layer during an etching process. The etching process includes bending the pre-curved support handle to have substantial curvature while peeling the epitaxial material from the substrate and forming an etch crevice therebetween. Compression is maintained within the epitaxial material during the etching process. The flattened, pre-curved support handle may be formed by flattening a pre-curved support material.
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