Scanning micromirror with improved performance and related electronic device
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United States of America Patent
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Jun 13, 2017
Grant Date -
Nov 12, 2015
app pub date -
May 4, 2015
filing date -
May 7, 2014
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Abstract
A micromechanical mirror includes a mobile mass carrying a mirror element and provided in a body including semiconductor material. A driving structure is coupled to the mobile mass to cause a scanning movement thereof. The driving structure is configured to generate a combination of a two or more sinusoidal resonant modes in the micromechanical mirror at respective resonant frequencies. This combination approximates a scanning pattern of the mobile mass defined by a linear function which may, in particular, be a triangular shaped function.
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